Péter Gordon, Bálint Balogh
Parameter control of laser beams in function of the pattern of multilayer structures
The development of electronic industry is strongly related to the permanently shrinking sizes, a challenge that in many instances cannot be coped with by means of the perfection of traditional technologies. The laser devices can be a useful means for their substitution, but as we do not know perfectly the processes that occur at the interaction of the laser with the material, we are unable to make the best of the laser technology. This contribution intends to highlight the features of this interaction, the impacts that the pattern applied on the substrate and the machining parameters have on the results of the machining process. We have set us the goal to exploit more efficiently the opportunities presented by the laser-based machining, by changing the laser beam parameters in function of pattern and material.